Abstract
This paper reports the effect of chlorine doping on the properties of spray-deposited cadmium oxide (CdO) thin films simultaneously doped with two metallic ions, zinc and magnesium. All the films have polycrystalline nature exhibiting cubic crystal structure. The preferential orientation along the (111) plane observed for the undoped and Zn, Mg co-doped CdO (ZMCO) films changed to (200) plane with Cl doping. Cl doping enhances the optical transparency of ZMCO thin films causing a blue shift in their band gap values which was attributed to Burstein–Moss (BM) effect. Electrical resistivity studies showed an increase in free carrier concentration of ZMCO films through Cl doping. The ZMCO films were found to have enhanced physical properties through Cl doping which make them suitable for optoelectronic applications.
Introduction
Cadmium oxide (CdO), a degenerate semiconductor due to its non-stoichiometric nature, has a wide range of applications in optoelectronics, solar cells, photo transistors, gas sensors, thin film resistors, etc. 1 Non-stoichiometric CdO exhibits n-type conductivity with electrical resistivity in the order of 10−2–10−4 Ω cm. CdO-based TCOs have received much attention due to their exceptional carrier concentration, nearly metallic conductivities and relatively simple cubic crystal structure. 2 The conduction properties of pure CdO are caused by their intrinsic natural structural point defects (cadmium interstitials, Cdi and oxygen vacancies, Vo) which can be altered by controlling them. Doping CdO with metallic ions such as Zn, 3 Mg, 4 Mn 5 and Li, 6 and with non-metallic ions such as F, 7 Cl 8 and B 9 is the best way to control the structural point defects. By doping, it is possible to create exotic properties in CdO, such as magnetic, optical, optoelectronic, etc., that would open its application as a TCO material. Recently, it was observed that multi different exotic properties in CdO can be introduced by co-doping it with different multi ions. By investigating the influence of Cu and Fe co-doping, Dakhel 10 reported that Cu ions improved the conduction parameters of CdO whereas Fe ions introduced magnetic properties in it. Improved optical properties of CdO, co-doped with Li and Ni, have been reported by Gupta et al. 11 High transparency, widened band gap and improved electrical properties have been reported by Usharani and Balu 12 for Zn-, Mg-co-doped CdO thin films. Besides this, doping CdO simultaneously with both metallic and non-metallic ions is quite interesting. Motivated by our previous results on Cl-doped CdO films, 8 in this work, Cl-doping is achieved on Zn-, Mg-incorporated CdO (ZMCO) thin films with 2, 4, 6 and 8 wt-% Cl concentrations, and the effects of Cl doping on the properties of ZMCO thin films were studied and the results are reported.
Experimental details
Thickness and structural parameters of undoped CdO, ZMCO and Cl-doped ZMCO thin films
Results and discussion
X-ray diffraction studies
Figure 1
a–f shows the XRD patterns of undoped CdO, ZMCO and Cl-doped ZMCO (Cl doping levels: 2, 4, 6 and 8 wt-%) thin films. All the films exhibit five diffraction peaks at 2θ values approximately equal to 33.022°, 38.243°, 55.172°, 65.990° and 69.272° indexed to (111), (200), (220), (311) and (222) planes of cubic CdO (JCPDS Card No. 73-2245). A close examination of the XRD patterns show that the preferential orientation is along the (111) plane for the undoped CdO and ZMCO thin films (Fig. 1
a and b), whereas for the Cl-doped ZMCO films it is along the (200) plane. Similar results have been reported earlier by Kumaravel et al.
2
for In-doped CdO thin films. They reported a (200) preferential orientation for the undoped CdO which changed to (111) preferential orientation with In doping. Zheng et al.
13
reported a change in preferential orientation from (200) to (111) plane for Sn-doped CdO thin films which they attributed to the presence of internal stress induced by the doping of Sn which can alter the energetic balance between different crystal plane orientations. Also the incorporation of Sn might have changed the diffusion rate of Cd and O at the surface during deposition, thereby leading to the variation of growth direction. The invariance in the preferential orientation observed for the ZMCO thin film infer that Zn, Mg (metallic ions) incorporation does not affect the crystal structure of pure CdO. However when chlorine (a non-metallic ion) is added to the ZMCO film, the growth direction is altered due to the internal stress induced by the Cl ions which alter the energetic balance between different crystal plane orientations. In our previous work,
8
when CdO is doped with chlorine no change in grain growth direction is observed and for both the undoped and doped films the preferential orientation remained the same as (111). However, the crystal growth behaviour observed in the present study seems to be interesting in the sense that when CdO is doped simultaneously with metallic and non-metallic ions, the non-metallic ions dominate the structural property of CdO. It is observed that the 2θ values of the dominant (111) peak of the ZMCO film shift towards higher Bragg angle (Table 1) inferring a contraction in the unit cell volume, whereas for the Cl-doped ZMCO films it shift towards lower Bragg angles supporting an expansion in their unit cell volume. This variation in the unit cell volume might be due to the ionic size differences between the dopant ions [(Zn2+ (0.74 Å), Mg2+ (0.72 Å), Cl– (1.81 Å)] and the host ions [(Cd2+ (0.97 Å), O2− (1.40 Å)]. The calculated lattice parameter values are given in Table 1.
XRD patterns of a undoped CdO, b ZMCO, c 2 wt-% Cl, d 4 wt-% Cl, e 6 wt-% Cl and f 8 wt-% Cl-doped ZMCO thin films
Scherrer formula and Williamson–Hall (W–H) method are used to estimate the crystallite size (D) values of the films according to the formulae14,15:
Williamson–Hall plots of the undoped CdO, ZMCO and Cl-doped ZMCO thin films
vs.
(Fig. 2). The calculated ‘D’ values are compiled in Table 1. (It is observed that the crystallite size value decreased for the ZMCO thin film which got enhanced with Cl doping. The increased D values observed for the Cl-doped ZMCO thin films favours that the crystalline quality improves with Cl doping.)

The strain (ε) and dislocation density (δ) of the films calculated using the formulae:
SEM analysis
Figure 3
a–f shows the FESEM images of undoped CdO, ZMCO and Cl-doped ZMCO (Cl doping levels: 2, 4, 6 and 8 wt-%) films. All the film surfaces appear to be homogenous composed of densely packed grains of different sizes. The grains appear to be interconnected with no pinholes or cracks for the undoped film (Fig. 3
a). With Zn, Mg incorporation the surface appears to be modified with nano-sized grains with well-defined boundaries (Fig. 3
b). Grain size of the ZMCO film appears to be increased with 2 wt-% Cl incorporation (Fig. 3
c). Traces of few clustered grains are also visible. With increase in Cl concentration, the surface gets modified with tightly packed equally sized grains for the film coated with 4 wt-% Cl concentration (Fig. 3
d). Nano-sized grains are visible for the ZMCO film coated with 6 wt-% Cl concentration (Fig. 3
e). As the Cl concentration is increased to 8 wt-%, grains with irregular shapes and sizes are visible (Fig. 3
f). Thus Zn, Mg incorporation enhances the film morphology of the undoped CdO film which was further enhanced with chlorine incorporation.
SEM images of a undoped CdO, b ZMCO, c 2 wt-% Cl, d 4 wt-% Cl, e 6 wt-% Cl and f 8 wt-% Cl-doped ZMCO thin films
Optical studies
The transmittance spectra of undoped CdO, ZMCO and Cl-doped ZMCO thin films (Fig. 4) showed that ZMCO film exhibit a better transparency compared to that of the undoped film which was further improved through chlorine doping. Increased transparency for the doped films might have been resulted from less scattering defects or from improved structural homogeneity. It is also observed that the absorption edge shifts towards lower wavelength side for the doped films suggesting an increase in their band gap values. From the fundamental absorption corresponding to electron excitation from the valence to conduction bands, optical band gap (Eg) values of the films were calculated. Using the relation between the absorption coefficient (α) and the incident photon energy (hυ), the Eg values are calculated by extrapolating the linear portion of the plots of ((αhυ)2 vs. hυ)
16
(Fig. 5) to α = 0, and the calculated values are provided against each film in Fig. 5. It is seen that the undoped film has a band gap of 2.47 eV which increased to 2.54 eV for the Zn-, Mg-incorporated CdO (ZMCO) film. The increased band gap value observed for the ZMCO film may be due to any of the following reasons: (i) sp-d spin-exchange interaction between the band electrons and localised spin of the metal ions as reported by Nagaraja et al.
17
for Mn-doped ZnO films, (ii) increased transition tail width and shift effect as reported by Benhaoua et al.
18
for Al-doped ZnO thin films and (iii) consequence of size effect as reported by Usharani and Balu
12
for Zn- and Mg-co-doped CdO thin films. Optical band gap is found to be blue shifted for Cl-doped ZMCO thin films, which can be attributed to Burstein–Moss (BM) effect. According to BM effect, increased free carrier concentration through Cl doping might have lifted the Fermi level into the conduction band which causes an increase in the band gap values. Similar blue shift in the optical band gap values with doping has been reported earlier by Kul et al.
19
and Ferro et al.
20
for F-doped CdO thin films. Besides BM effect, electron localisation within the crystallites, disorder and defects at grain boundaries might have also played a role in widening the band gap values.
21
Transmittance spectra of the undoped CdO, ZMCO and Cl-doped ZMCO thin films Plots of (αhν)2 vs. hν of the undoped CdO, ZMCO and Cl-doped ZMCO thin films

PL studies
Emission peaks at 340, 361, 420 and 461 nm are evinced from the room temperature PL spectra of undoped CdO, ZMCO and Cl-doped ZMCO thin films (Cl doping levels: 2 and 6 wt-%) (Fig. 6). A small intense peak observed at 393 nm for the ZMCO and Cl-doped ZMCO films might be due to the transition of electrons to the valence band from the localised level slightly above the conduction band which can be assigned to a shallow donor originated from the complex defect (Zni) as reported by Wang et al.
22
for Mg and Al co-doped ZnO thin films. This peak corresponds to pure CdO as reported in the literature.
23
Transitions due to excitons at higher energy levels caused by recombination of excitons and/or shallowly trapped electron/hole pairs might have attributed to the emission peak observed at 340 nm. Near band edge attributed to free exciton annihilation is responsible for the peak at 361 nm.
24
The formation of new energy levels in the band gap of CdO resulting from the reconstruction of the photo-generated hole with an electron occupying the oxygen vacancy is responsible for the emission peak at 420 nm. The blue emission peak at 461 nm may be due to the electronic transitions to the top of the valence band from cadmium interstitials and/or oxygen vacancies.
PL spectra of the undoped CdO, ZMCO and Cl-doped ZMCO thin films
Electrical studies
The electrical properties (resistivity and carrier concentration) of undoped CdO, (Zn, Mg)-incorporated CdO (ZMCO) and Cl-doped ZMCO thin films are shown in Fig. 7. All the films have resistivity in the order of 10−3 Ωcm which exactly matches with the values reported by Rajammal et al.
25
for sol–gel spin-coated CdO thin films. It is observed that free carrier concentration determines the resistivity variation of the as deposited films. The carrier concentration of undoped film was found to be equal to 1.189 × 1020 cm−3 which increased to 1.604 × 1020 cm−3 for ZMCO thin film. Increased carrier concentration observed for the ZMCO thin film might be due to increased oxygen vacancies created as Zn2+ and Mg2+ ions substitutionally replaced Cd2+ ions in the host lattice. The carrier concentration of ZMCO films is further increased with Cl doping, which might be due to improved crystalline quality achieved through successful substitution of Cl ions into the CdO lattice replacing O2 ions.
Variation of carrier concentration and electrical resistivity of the undoped CdO, ZMCO and Cl-doped ZMCO thin films
Conclusion
Undoped CdO, ZMCO and Cl-doped ZMCO thin films were successfully prepared by spray technique using perfume atomiser on glass substrates. XRD studies confirmed the polycrystalline nature of all the films. Crystallite size decreased for the ZMCO film which got increased with Cl doping. FESEM images showed that the surfaces of all the films appeared to be homogeneous composed of densely packed grains. Optical studies showed that the transmittance value of the undoped CdO increased from 77.84 to 81.9% for the ZMCO film which further improved to 89.37% with Cl doping. Electrical studies showed that film resistivity of pure CdO decreased with (Zn, Mg) incorporation which further decreased with Cl doping. Thus doping CdO with metallic ions (Zn and Mg) resulted in improving its optical and electrical properties which got further enhanced through doping with chlorine a non-metallic ion. The obtained results conclude that Cl-doped ZMCO thin films would be suitable for future optoelectronic applications.
Footnotes
Acknowledgements
The authors thank the head, Department of Physics, Alagappa University for the XRD measurements.
