This article presents a novel design of a flexure-based, piezoelectric actuated, completely decoupled, high-bandwidth, highresolution, and large stroke parallel XY micromanipulator with two amplification levers. The monolithic mechanism is featured with dual working modes, which meets different kinds of requirements in terms of high resolution and large workspace in micro/nano fields. In order to reduce the displacement loss, the modeling and analysis of bending motion of the levers are conducted; thereafter, compliance and stiffness modeling by employing the matrix method are established. Furthermore, the dynamics modeling and analysis via Lagrange equations are performed to improve the dynamic properties of the mechanism. The simulation results of finite element analysis indicate that the cross-coupling between the two axes is kept to 1.2%; meanwhile, the natural frequency of the mechanism is about 700 Hz, and the amplifier ratio is approximately 2.32. Both theoretical analysis and finite element analysis results well validate the performance of the proposed mechanism.
OuyangPRZhangWJGuptaMM. Overview of the development of a visual based automated bio-micromanipulation system. Mechatronics2007; 17(10): 578–588.
2.
Tang H, Li Y and Zhao X. Hysteresis modeling and inverse feedforward control of an AFM piezoelectric scanner based on nano images. In: IEEE International Conference on Mechatronics and Automation, Beijing, China, 21–23 June 2011, pp.189–194. Piscataway, NJ: IEEE Press.
3.
KhanSSabanovicA. Hybrid vision/force feedback control for pushing micro-objects2009IEEE International Conference on Intelligent Robots and Systems10–15 OctoberSt. Louis, MOPiscataway, NJ: IEEE Press, 577–582.
4.
Haake JM. Micro-aligner for precisely aligning an optical fiber and an associated fabrication method. Patent 6,253,011, USA, 2001.
5.
HowellLLCompliant mechanisms. New York: Wiley, 2001
Leang KK and Devasia S. Feedback-linearized inverse feedforward for creep, hysteresis, and vibration compensation in AFM piezoactuators. IEEE Trans Control Syst Technol 2007; 15(5): 927–935.
8.
YongYKAphaleSMoheimaniSOR. Design, identification and control of a flexure-based XY stage for fast nanoscale positioning. IEEE Trans Nanotechnol2009; 8(1): 46–54.
9.
YaoQDongJFerreiraP. Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int J Mach Tools Manuf2007; 47(6): 946–961.
10.
AwtarSSlocumAH. Constraint-based design of parallel kinematic XY flexure mechanisms. Trans ASME J Mech Des2007; 129(8): 816–830.
11.
LiYXuQ. Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator. IEEE Trans Rob2009; 25(3): 645–657.
12.
OguamanamDCDAlmeidaSFMHansenJS. Stress stiffening effects in laminated beams with piezoelectric actuators. J Intell Mater Syst Struct1998; 9(2): 137–145.
13.
Choi K-B and Lee JJ. Analysis and design of linear parallel compliant stage for ultra-precision motion based on 4-PP flexural joint mechanism. In: Procceedings of International Conference on Smart Manufacturing Application, Goyang-si, South Korea, 9–11 April 2008, pp.35–38. Piscataway, NJ: IEEE Press.
14.
LiawHShirinzadehB. Constrained motion tracking control of piezo-actuated flexure-based four-bar mechanisms for micro/nano manipulation. IEEE Trans Autom Sci Eng2010; 7(3): 699–705.
15.
KongXGosselinCM. Type synthesis of 3-DOF translational parallel manipulators based on screw theory. ASME J Mech Des2004; 126(1): 83–92.
16.
HerveJM. Uncoupled actuation of pan-tilt wrists. IEEE Trans Rob2006; 22(1): 56–64.
17.
LiuX-JWangJ. A new methodology for optimal kinematic design of parallel mechanisms. Mech Mach Theory2007; 42(9): 1210–1224.
18.
Chablat D and Wenger P. A new concept of modular parallel mechanism for machining applications. In: Proceedings of IEEE International Conference on Robotics and Automation, Taipei, Taiwan, 14–19 September 2003, pp.3965–3970. Piscataway, NJ: IEEE Press.
19.
Huang J and Li Y. Design and analysis of a completely decoupled compliant parallel XY micro-motion stage. In: Procceedings of IEEE International Conference Robotics and Biometics, Tianjin, China, 14–18 December 2010, pp.1008–1013. Piscataway, NJ: IEEE Press.
20.
Tang X and Chen I-M. A large-displacement 3-DOF flexure parallel mechanism with decoupled kinematics structure. In: Procceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, Beijing, China, 9–15 October 2006, pp.1668–1673. Piscataway, NJ: IEEE Press.
21.
YongYKLuT-FHandleyDC. Review of circular flexure hinge design equations and derivation of empirical formulations. Precis Eng2008; 32(2): 63–70.
LobontiuNGarciaE. Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms. Comput Struct2003; 81(32): 2797–2810.
24.
KimJHKimSHKwakYK. Development and optimization of 3-D bridge-type hinge mechanisms. Sens Actuators A Phys2004; 116(3): 530–538.
25.
KindtJHFantnerGECutroniJA. Rigid design of fast scanning probe microscopes using finite element analysis. Ultramicroscopy2004; 100: 259–265.
26.
Huang J, Li Y and Zhao X. Optimization of a completely decoupled flexure-based parallel XY micro-motion stage. In: Procceedings of IEEE International Conference on Mechatronics and Automation, Beijing, China, 7–10 August 2011, pp.69–74. Piscataway, NJ: IEEE Press.
27.
JouanehMYangR. Modeling of flexure-hinge type lever mechanisms. Precis Eng2003; 27: 407–418.
28.
MinKSChoiWCSongSH. Static and dynamic analysis of a nanopositioning flexure-hinge stage with a flexible lever mechanism. Proc IMechE Part B: J Engineering Manufacture2005; 219: 447–454.
29.
Koseki Y, Tanikawa T, Koyachi N, et al. Kinematic analysis of translational 3-DOF micro parallel mechanism using matrix method. In: Procceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems, Takamatsu, Japan, 31 October–5 November 2000, pp. 786–792. Piscataway, NJ: IEEE Press.
30.
DaiJSDingX. Compliance analysis of a three-legged rigidly connected platform device. ASME J Mech Des2006; 128(4): 755–764.
