Design and fabrication of a microelectromechanical systems polymeric micropump

This article introduces a polymeric micropump actuated by a PbZrTiO₃ (lead zirconate titanate) bimorph. The pump body was made of polymethyl methacrylate substrate, and the passive valves were fabricated by SU-8 lift-off technique. First, the vibration performances of parts including lead zirconate titanate, membrane and valve were analyzed by finite element model. Then, the valve unit was assembled by ultrasonic bonding. An energy director was designed on the valve deck to realize precise positioning of the valve components. Finally, the flow performance of the micropump was studied by frequency-sweeping experiments, and the experimental results approximately coincided with the finite element model analysis. Under the driving frequency of 550 Hz and voltage of 210 V (peak–peak), the maximum flow rate reached 18.2 mL/min. This study provides an effective and a reliable way to fabricate polymeric micropumps.